SECS/GEM Data Items
einvensysdm
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  • Reads 4
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  • Parts 1
  • Time <5 mins
einvensysdm
Ongoing, First published Mar 11, 2019
automationfabgemsecs
SECS/GEM is an industry standard, that defines standard process of communication between equipment and fab host software for controlling and monitoring purposes. By connecting SECS/GEM equipment, fabs can immediately gain operational benefits. Factory hosts can collect data in multiple ways. Along with event reports, the fab host often requires to poll the equipment for current data values. The host can directly request Data values , or can be sampled periodically  in a trace report this process is called Data Polling
There are 3 categories of Data Items defined in SECS/GEM standards:
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