Robotphoenix Wafer Handling Robot

https://www.rprobotic.com/products/wafer-handling-robot/

Based on the pioneering technology of intelligent high-speed parallel delta robot, Robotphoenix invented new 4-DOF parallel semiconductor wafer handling robots of single-platform and dual-platform, which broke through the bottleneck to realize a larger swing angle and higher output speed in multi-closed-loop parallel mechanism. The dual-platform robot angle can reach at least ±180°, and under 0.1kg payload, the fastest travel beat of running in the standard doorframe-shaped trajectory can reach 0.28s. Maximum acceleration is 15g.