Story cover for Robotphoenix Wafer Handling Robot by rprobotic
Robotphoenix Wafer Handling Robot
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  • Reads 1
  • Votes 0
  • Parts 1
  • Time <5 mins
Ongoing, First published Jun 07, 2024
https://www.rprobotic.com/products/wafer-handling-robot/


Based on the pioneering technology of intelligent high-speed parallel delta robot, Robotphoenix invented new 4-DOF parallel semiconductor wafer handling robots of single-platform and dual-platform, which broke through the bottleneck to realize a larger swing angle and higher output speed in multi-closed-loop parallel mechanism. The dual-platform robot angle can reach at least ±180°, and under 0.1kg payload, the fastest travel beat of running in the standard doorframe-shaped trajectory can reach 0.28s. Maximum acceleration is 15g.
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