Silicon Susceptor

https://www.dstcsemi.com/products/silicon-susceptor/

The Silicon Susceptor is utilized in semiconductor CVD and PVD machines to provide support for wafers during high-temperature processes, ensuring stability and preventing any potential damage caused by nitrogen flow or accidental dropping. Compared to SiC Susceptor, Silicon Susceptor has the same material as the wafer, the same coefficient of thermal expansion, and a shorter delivery time