Silicon Injector

https://www.dstcsemi.com/products/silicon-injector/

The Silicon Injector from DSTC is a crucial component in the heat treatment process and deposition of silicon wafers, directly impacting their heat treatment effectiveness and deopsition performance. Heat treatment of silicon wafers plays a vital role in semiconductor and integrated circuit processing, with its outcome closely tied to the final performance of the wafer.

Silicon heat treatment encompasses oxidation, diffusion, annealing, and other processes. During this procedure, semiconductor silicon must be placed inside the furnace body, requiring a pipeline for gas entry into the furnace body known as the silicon Injector.

Applied to HP and deposition equipment, SiFusion silicon nozzle is a key component to deliver chemical gases. The deposition thickness is up to 300μm, 10 times of that of quartz injectors.